Guest Editorial Special Section on EDTM 2022

Abstract

This Special Issue of the IEEE Journal of the Electron Devices Society is a selection of papers presented at the 2022 IEEE Electron Devices Technology and Manufacturing (EDTM) Conference. EDTM Conference was established by the IEEE Electron Devices Society (EDS) to enable further performance/functionality enhancement of semiconductor devices and systems with manufacturing innovations to overcome scaling challenges. EDTM provides the premier global forum for researchers and engineers from around the world coming to share new discoveries and discuss about any device/manufacturing-related topics, including but not limited to, materials, processes, devices, packaging, modeling, reliability, manufacturing and yield, tools, testing, and any emerging device technologies, as well as workforce training. EDTM rotates among Asian countries where hot-hubs of semiconductor manufacturing are located. The 6th EDTM Conference (EDTM 2022) was successfully held during March 6-9, 2022. The Theme for EDTM 2022 was Semiconductor Devices and Manufacturing Innovations for a More Sustainable World. Although EDTM 2022 was originally planned to be held in Oita, where many semiconductor companies have facilities, and called as silicon island in Japan, the conference was actually held in the fully virtual format with live sessions due to the pandemic. EDTM2022 was a four-day conference comprising a one-day tutorial/short course and a three-day technical program including 66 regular papers, 72 invited papers, 5 plenary talks, and a keynote lecture on the asteroid explorer. Special sessions on integrated materials were also held. This time we selected 8 excellent papers for the J-EDS special issue on EDTM 2022. We hope you enjoy the latest achievements on innovative technologies.