A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes

Yansong Liu; Chao Zhao; Lisong Dong; Rui Chen; Yaya Wei

doi:10.33079/jomm.18010103

Journal of Microelectronic Manufacturing (Sep 2018)

A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes

Yansong Liu,
Chao Zhao,
Lisong Dong,
Rui Chen,
Yaya Wei

Affiliations

Yansong Liu: Key Laboratory of Microelectronic Devices, &, Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
Chao Zhao: Key Laboratory of Microelectronic Devices, &, Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China;University of Chinese Academy of Sciences, Beijing 100049, China
Lisong Dong: Key Laboratory of Microelectronic Devices, &, Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
Rui Chen: Key Laboratory of Microelectronic Devices, &, Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
Yaya Wei: Key Laboratory of Microelectronic Devices, &, Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China;University of Chinese Academy of Sciences, Beijing 100049, China

DOI: https://doi.org/10.33079/jomm.18010103
Journal volume & issue: Vol. 1, no. 1

Abstract

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Micro-sieves have been widely used in medical treatment, quarantine, environment, agriculture, pharmacy and food processing. However, the manufacturing and yield improvement have been difficult due to multiple challenges, such as the sieve unit release defect, cracking, and KOH corrosion. In this paper, we report process details and discuss technical difficulties which are usually the root-causes for process failures, and demonstrate a reliable and high yield production of SiNx micro-sieves processed with our novel method, which is also compatible with high volume manufacturing.

Published in Journal of Microelectronic Manufacturing

ISSN: 2578-3769 (Online)
Publisher: JommPublish
Country of publisher: United States
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks; Technology: Technology (General): Industrial engineering. Management engineering: Production capacity. Manufacturing capacity
Website: http://www.jommpublish.org/

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