Journal of Microelectronic Manufacturing
2578-3769 (Online)
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Permanent article identifier:
- DOI
Journal metadata
- Publisher
- JommPublish , United States
- Other organisation
- Institute of Microelectronics of Chinese Academy of Sciences
- Manuscripts accepted in
- English
- LCC subjects Look up the Library of Congress Classification Outline
- Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
- Technology: Technology (General): Industrial engineering. Management engineering: Production capacity. Manufacturing capacity
- Keywords
- semiconductor manufacutring microelectronics integrated circuit device simulation process
