Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr

Abstract

The studies of the structure and properties of nanoscale multilayer coatings of Zr- and Cr-based refractory metals obtained by the vacuum arc cathode deposition are summarized in a brief review of the literature data. A comparative analysis of the microstructure and properties of ZrN/CrN composite coatings depending on the deposition conditions (constant negative potential of the substrate, pulsed high-voltage bias potential, partial pressure, reaction gas velocity) and modulation period for multilayered structure is carried out. General regularities consisting in the presence of the columnar structure and the growth texture are revealed. They show that there is a prevailing (111) orientation for investigated coatings. Conditions for obtaining improved physical, mechanical, and tribological properties of the coatings are determined.

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