A Novel Sealing Redistribution Layer Approach for Through-Glass via Fabrication

Abstract

A sealing redistribution layer (RDL) approach for the interposer fabrication is developed to simplify the conventional bottom-up process flow. By using this approach, bottom-up plating can achieve the integration of Cu-filler plating and its bottom RDL simultaneously. In this paper, through-glass via in glass interposer or 3-D integration is fabricated using the proposed approach. The electrical measurement and reliability tests indicate that the proposed approach can be an attractive candidate for interposer fabrication with great performance.

Keywords

• Through-Glass via (TGV)
• redistribution layer
• glass interposer
• 3D integration