IEEE Journal of the Electron Devices Society (Jan 2018)

Interface Coupled Photodetector (ICPD) With High Photoresponsivity Based on Silicon-on-Insulator Substrate (SOI)

  • Jianan Deng,
  • Jinhai Shao,
  • Bingrui Lu,
  • Yifang Chen,
  • Alexander Zaslavsky,
  • Sorin Cristoloveanu,
  • Maryline Bawedin,
  • Jing Wan

DOI
https://doi.org/10.1109/JEDS.2017.2788403
Journal volume & issue
Vol. 6
pp. 557 – 564

Abstract

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A CMOS-compatible photodetector with high responsivity is reported. This device utilizes the unique interface coupling effect found in fully depleted silicon on insulator (SOI) MOSFETs. Unlike conventional SOI photodetectors, the proposed device shows higher photoresponsivity in thinner Si films due to stronger interface coupling, as confirmed by TCAD simulations. A prototype device fabricated with a simplified process flow achieves a record photoresponsivity up to 3.3 x 104 A/W.

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