Highly Sensitive Piezoresistive Sensors Based on a Voltage Divider Circuit With TFTs for Ultra-Low Pressure Detection

Abstract

A highly sensitive piezoresistive tactile sensor combined with the thin-film transistors (TFTs) is produced in this letter. The sensor uses two-dimensional Ti3C2-MXenes as piezoresistive material which is one type of transition metal carbide, nitride and/or carbonitride with a lamellar structure. A voltage divider circuit is designed by connecting piezoresistive material with TFT technology. TFT works in the subthreshold and saturation region during the sensing process to ensure that the magnitude change of current is measured in a small voltage range. The tactile sensor shows high sensitivity of 4636.1 kPa $^{-1}$ , ultra-low tactile detection of 0.98 Pa, and extremely durability for 1,500 sensing cycles. Resultantly, the sensor demonstrates excellent potential for electronic touchscreens and advanced medical testing.

Keywords

• Piezoresistive
• TFTs
• voltage divider circuit
• ultra-low tactile detection