IEEE Journal of the Electron Devices Society (Jan 2021)

Two-Dimensional Inverters Based on MoS₂-hBN-Graphene Heterostructures Enabled by a Layer-by-Layer Dry-Transfer Method

  • Yachun Liang,
  • Jiankai Zhu,
  • Fei Xiao,
  • Bo Xu,
  • Ting Wen,
  • Song Wu,
  • Jing Li,
  • Juan Xia,
  • Zenghui Wang

DOI
https://doi.org/10.1109/JEDS.2021.3097995
Journal volume & issue
Vol. 9
pp. 1269 – 1274

Abstract

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Two-dimensional (2D) layered materials offer unique opportunities for building novel nanoscale electronics devices. As the family of 2D materials and their heterostructure continue to grow, it is desirable to have a technique capable of quickly prototyping 2D devices for efficient exploration of new materials and devices. Here, we demonstrate a facile all-dry transfer technique that can very efficiently build 2D devices, and show that a digital inverter can be realized using such technique. Our results can be leveraged for building and testing new types of 2D nanodevices with high throughput.

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