Effect of Low-Energy Inert-Gas Ion Bombardment of the Metal Surface on the Oxygen Adsorption and Oxidation

Abstract

It is well known that the metal-surface properties vary as a result of the surface layers ion sputtering in vacuum. This review contains results of the studies of kinetics change of oxygen adsorption and oxidation on the surface of transition metals and alloys in a vacuum during the low-energy (< 10 keV) Ar+ ions bombardment. Particularly, the results of the systematic studies of the surface of Cu, Ni, Fe, Co single crystals, and Fe–Ni alloy are presented. The important role of such parameters as a dose of the ion bombarding, ion energy and sample temperature in the chemical activity of surface is noted. It is argued that mechanism of interaction in surface–gas system is substantially controlled by the optimal ratio between the energy and primary ion current density, as well as sputtering rate of natural oxide on the target surface.

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