IEEE Journal of the Electron Devices Society (Jan 2023)

Lithium-ion-Based Resistive Devices of LiCoO<sub>2</sub>/LiPON/Cu With Ultrathin Interlayers of Titanium Oxide for Neuromorphic Computing

  • Takao Marukame,
  • Koichi Mizushima,
  • Kumiko Nomura,
  • Yoshifumi Nishi

DOI
https://doi.org/10.1109/JEDS.2023.3265392
Journal volume & issue
Vol. 11
pp. 602 – 610

Abstract

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Lithium (Li)-ion materials such as LiCoO2 and (Li3PO4)-N (LiPON) are used in Li-ion all-solid-state batteries, and are now expected to be used as ion-electron hybrid materials to create a new degree of freedom in future integrated circuits. We fabricated thin-film devices on the basis of LiCoO2/LiPON/Cu and ultrathin titanium oxide ( ${\mathrm {TiO}}_{x}$ ) to demonstrate their new type of resistance change mechanism and characteristics. Multi-level resistance changes promising as synaptic plasticity were obtained, and the resistance properties enable neuromorphic computing to enter a new era.

Keywords