A Study on Selectivity and Temperature Coefficients of the Chloride Ion Sensors With RuO<sub>x</sub> Thin Film

Shi-Chang Tseng; Tong-Yu Wu; Jung-Chuan Chou; Yi-Hung Liao; Chih-Hsien Lai; Jian-Syun Chen; Min-Siang Huang; Siao-Jie Yan; Si-Hong Lin

doi:10.1109/JEDS.2018.2886300

IEEE Journal of the Electron Devices Society (Jan 2019)

A Study on Selectivity and Temperature Coefficients of the Chloride Ion Sensors With RuO<sub>x</sub> Thin Film

Shi-Chang Tseng,
Tong-Yu Wu,
Jung-Chuan Chou,
Yi-Hung Liao,
Chih-Hsien Lai,
Jian-Syun Chen,
Min-Siang Huang,
Siao-Jie Yan,
Si-Hong Lin

Affiliations

Shi-Chang Tseng: Graduate School of Mechanical Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Tong-Yu Wu: Graduate School of Mechanical Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Jung-Chuan Chou: ORCiD; Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Yi-Hung Liao: ORCiD; Department of Information and Electronic Commerce Management, TransWorld University, Douliu, Taiwan
Chih-Hsien Lai: ORCiD; Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Jian-Syun Chen: Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Min-Siang Huang: Department of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Siao-Jie Yan: Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan
Si-Hong Lin: Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan

DOI: https://doi.org/10.1109/JEDS.2018.2886300
Journal volume & issue: Vol. 7
pp. 140 – 149

Abstract

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This paper investigated the response time, chloride selectivity, and temperature coefficients of the arrayed flexible ruthenium oxide chloride ion sensor in sodium chloride (NaCl) solutions with concentrations from 10-5 M to 1 M. The response time was 7 s in 1 M NaCl solution at room temperature, showing that the sensor had the characteristics of the fast response. The selectivity coefficients of the SO42- ion, NO3- ion, CO32- ion, ClO- ion, and ClO4- ion were 0.001, 0.056, 0.004, 0.015, and 0.006, respectively. The chloride ion sensing device had the good chloride selectivity. Finally, the sensitivity was investigated with different solution temperatures from 5 °C to 50 °C. The sensitivity was increased with higher solution temperature. The temperature coefficient of the sensitivity of the chloride ion sensing device was approximately 0.681 mV/pCl °C between 5 °C and 35 °C.

Published in IEEE Journal of the Electron Devices Society

ISSN: 2168-6734 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering
Website: https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=6245494

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